20/10 Perfect Vision Optische Geraete

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	Quelques documents de 20/10 Perfect Vision Optische Geraete
	Batch integration of high-quality materials to microsystems Q2M 2006 - 2009 Sujets : Electronics, Microelectronics, Information Processing, Information Systems Type de contrat : Specific Targeted Research Project Participants : KUNGLIGA TEKNISKA HOGSKOLAN SVERIGE KUNGLIGA TEKNISKA HOGSKOLAN Education VALHALLAVAGEN 79 100 44 SVERIGE PULSE FINLAND OY SUOMI/FINLAND PULSE FINLAND OY Industry TAKATIE 6 90440 SUOMI/FINLAND CRANFIELD UNIVERSITY UNITED KINGDOM CRANFIELD UNIVERSITY Education WHARLEY END MK43 0AL UNITED KINGDOM IBM RESEARCH GMBH SCHWEIZ/SUISSE/SVIZZERA IBM RESEARCH GMBH Research SAEUMERSTRASSE 4 SCHWEIZ/SUISSE/SVIZZERA 20/10 PERFECT VISION OPTISCHE GERAETE GMBH DEUTSCHLAND 20/10 PERFECT VISION OPTISCHE GERAETE GMBH Other AM TAUBENFELD 21/1 69123 DEUTSCHLAND MICRONIC LASER SYSTEMS AB SVERIGE MICRONIC LASER SYSTEMS AB Industry PO Box 3141 183 03 SVERIGE FORSCHUNGSZENTRUM KARLSRUHE GESELLSCHAFT MIT BESCHRAENKTER HAFTUNG DEUTSCHLAND FORSCHUNGSZENTRUM KARLSRUHE GESELLSCHAFT MIT BESCHRAENKTER HAFTUNG Research WEBERSTRASSE 5 76133 DEUTSCHLAND FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V DEUTSCHLAND FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V Research,Other HANSASTRASSE 27C 80686 DEUTSCHLAND KATHOLIEKE UNIVERSITEIT LEUVEN BELGIQUE-BELGIË KATHOLIEKE UNIVERSITEIT LEUVEN Education OUDE MARKT 13 3000 BELGIQUE-BELGIË STEINBEIS GMBH & CO. KG FUER TECHNOLOGIETRANSFER DEUTSCHLAND STEINBEIS GMBH & CO. KG FUER TECHNOLOGIETRANSFER Other WILLI-BLEICHER-STRASSE 19 HAUS DER WIRTSCHAFT 70174 DEUTSCHLAND VALTION TEKNILLINEN TUTKIMUSKESKUS SUOMI/FINLAND VALTION TEKNILLINEN TUTKIMUSKESKUS Research PO Box 1000 VUORIMIEHENTIE 3 02044 SUOMI/FINLAND PONDUS INSTRUMENTS AB SVERIGE PONDUS INSTRUMENTS AB Industry PO Box 178 162 12 SVERIGE PULSE FINLAND Finland PULSE FINLAND Industry TAKATIE 6 90440 Finland MICRONIC LASER SYSTEMS Sweden MICRONIC LASER SYSTEMS Industry PO Box 33 03 Sweden PONDUS INSTRUMENTS Sweden PONDUS INSTRUMENTS Industry PO Box 2 12 Sweden Hide objective Integration of high-performance materials in microsystems (integrated electronics, systems, sensors and actuators) is limited by process incompatibility mainly (materials, temperature budget). Many technology combinations promising novel functionality in a large range of applications can therefore either not be realised today (e.g. high-performance sensors/actuators on CMOS), or are manufactured on a per-device level in a pick-and-place scheme with resulting high fabrication costs (e.g. microvalves), hindering such components from reaching the market and forcing industry to disregard the development of many novel devices. The main objective of Q2M is therefore to develop methods that allow the cost efficient combination and integration through batch-microfabrication of components and materials that are unsuited for monolithic integration. This allows novel functionality and reduced manufacturing costs. Two main strategies will be followed to push the technology beyond its current barriers. The first is the development of high quality actuator materials and their micromachining methods suited for wafer-scale fabrication. The second strategy is the development of transfer bonding methods for transferring materials and devices to semiconductor or polymer substrates. The development of both strategies will be guided by the specifications from three application areas: microvalving, micro-optics and RF-MEMS (radio frequency microelectronic components). Test structures will evaluate the developed techniques. The Consortium has six research focussed partners, each expert/pioneer in at least one core aspect of the multidisciplinary scientific challenge, and five application focussed partners (2 SMEs, 3 larger consortia), chosen to anchor the work in real industrial needs while creating the basis for further development and exploitation. Moreover, a Q2M User Group of interested companies is formed for technology spreading and exploitation outside the consortium. Source : cordis